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Book Cover
Book

Title MEMS mechanical sensors / Stephen Beeby ... [et al.].

Imprint Boston : Artech House, 2004

Copies

Location Call No. Status
 Female Library  TK7875 M4537 2004    Available
 Female Library  TK7875 M4537 2004 c.2  Available
Description x, 269 p. : ill. ; 26 cm.
Series Artech House microelectromechanical systems (MEMS) series
Bibliography Includes bibliographical references and index.
Subject Microelectromechanical systems
Detectors
Added Author Beeby, Stephen
ISBN 1580535364 (alk. paper)
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